EPI SCRUBBERS
Cireco Mpa Srl designs and manufactures EPI scrubbers for epitaxial applications.
epi scrubber for semiconductor industries.
This scrubbers are located downstream to the outlet gases of epitaxial reactors used for wafer growth in semiconductor industries.
The first scrubbing step takes place in the frontal inlet. Gases trough the bells encounter a water liquid barrier where silanes decompose into HCl and porous Silica which cristallizes and falls as porous flakes in the reservoir.
The second and most important step is located in the turret filled by two layers of packed rings sprayed by water in counter-current (gas goes up and water from spray nozzles goes down). Here we have the absorption of HCl and Hydrides that fall down in the scrubber tank.
Depending on the model the scrubbers could have a third step in the Venturi throat where there is a high contact surface.
The Venturi is used to create vaccuum inside the scrubber for the suction of the gas and as absorption system in water venturi scrubbers
The vacuum regulation is made in two different way:
- With a fixed frequency regulation for Air venturi scrubbers (fan regulation)
- Vacuum transducer retroactivity: the real vacuum is read by the transducer that adjusts the motor frequency of fan or pump (depending on the scrubber model) to achieve the set point vacuum selected by the operator. This procedure is made by a PID regulation by the Inverter and PLC. In this way the stability of the vacuum is guaranteed also for gas flow rate variations.
The machine is also equipped with the following systems:
- Self-cleaning or manual system for bells
- Water saving system, thanks to reactor signal
- Warning and fault indication in the control panel, beacon and remote signal to the reactor
- Gas dilution with a fan blower
- Optional level switch and leakage sensors
- Optional upper drainage systems
Waste Gas Treatment with Wet Scrubbers
Here below we reported the main scrubber models with respective technical data sheets
Air venturi scrubbers
Wet venturi scrubbers
customizable
EPI scrubbe
Cireco MPA many highly customizable EPI scrubber models to meet the specific needs of each customer. While maintaining the high quality standards that distinguish all Cireco products unchanged, it is possible to adapt different aspects of the scrubbers to perfectly adapt to any application context.
Sizing and flow rate:
The scrubber’s treatment capacity is calibrated based on the volume of gas to be purified, guaranteeing the desired reduction efficiency.
Dimensions and overall dimensions of the system can be adapted to optimize integration into the space available at the customer’s site.
Features and accessories:
Advanced options such as automatic pH control systems, level and temperature sensors, outlet gas dilution systems and automatic water drain can be integrated to meet specific process needs.
Cireco MPA also offers the possibility of implementing remote monitoring and control systems for real-time supervision of the plant.
Interfaces and compatibility:
EPI scrubbers can be interfaced with other purification or control systems present at the customer’s site, ensuring perfect integration into the production process.
The modular design facilitates adaptation to different system configurations.
We actively collaborate with the customer right from the design phase to fully understand their needs and develop the most effective and personalized purification solution. The company offers a complete consultancy service for the choice of materials, correct sizing and the implementation of specific functions. In this way, Cireco MPA EPI scrubbers are configured as flexible and reliable solutions capable of combining high abatement efficiency, tailor-made customization and compliance with the high quality standards that have always distinguished us.
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